Tube Diameter : 308phi(Quartz)
Tube Length : 3m
Loading Capa. : ,10kg
Control cabinet
Upper and Down independence control
Purification Division
ELS-308D-D
Protection of 2units Heater Over Temp.
ATM sensor, Flow sensor, Pressure sensor
Good Safety function
Full Automation(Program control)
Time control By-pass valve(3units)
“D” company – 9 Units

Tube Diameter : 308phi(Quartz)
Tube Length : 3m
Electrical cabinet
HMI (PC control and monitoring)
Protection of 2units Heater Over Temp.
Purification Division
ATM sensor, Flow sensor, Pressure sensor
Good Safety function
Full Automation(Program control)
Time control By-pass valve(3units)
“C” company – 5 Units